![[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Fluorine Saturated Yttrium (YF) Based Coatings for Advanced Semiconductor ULSI Manufacturing]()
[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Fluorine Saturated Yttrium (YF) Based Coatings for Advanced Semiconductor ULSI ManufacturingPadron-Wells, Gabriel; VanOverloop, Michael; Yeo, Junghyeon; Abit, Avun; Finneran, Kevin; Mclaughlin, Lenore; Greuter, Ryan · 2019