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Structural and optical properties of pulsed-laser deposited crystalline β-Ga2O3 thin films on silicon

Structural and optical properties of pulsed-laser deposited crystalline β-Ga2O3 thin films on silicon

Berencén, Yonder; Xie, Yufang; Wang, Mao; Prucnal, Slawomir; Rebohle, Lars; Zhou, Shengqiang
  • 期刊名称Semiconductor Science and Technology
  • 作者Berencén, Yonder; Xie, Yufang; Wang, Mao; Prucnal, Slawomir; Rebohle, Lars; Zhou, Shengqiang
  • 印刷ISSN0268-1242
  • 电子ISSN1361-6641
  • 文件大小712.44KB
  • 发表时间2019-01-08
  • DOI10.1088/1361-6641/aafc90
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