A Resonant Pressure Microsensor With a Stress Isolation Layer
- 期刊名称IEEE Sensors Journal
- 作者Lu, Yulan; Xie, Bo; Wei, Qiuxu; Li, Yadong; Shi, Xiaoqing; Xiang, Chao; Chen, Deyong; Wang, Junbo; Chen, Jian
- 卷第19卷
- 期第18期
- 印刷ISSN1530-437X
- 电子ISSN1558-1748
- 文件大小2165.81KB
- 发表时间2019-9-15
- DOI10.1109/JSEN.2019.2918771
- 页码7875-7883
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