![SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Diffractive optical element for optical data storage]()
SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Diffractive optical element for optical data storageYoshida, S.; Unno, N.; Akamatsu, H.; Yamada, K.; Taniguchi, J.; Yamamoto, M.; Bodermann, Bernd; Frenner, Karsten; Silver, Richard M. · 2013