![[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Investigation of Apertureless NSOM for Measurement of Stress in Strained Silicon-on-Insulator Test Structures]()
[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Investigation of Apertureless NSOM for Measurement of Stress in Strained Silicon-on-Insulator Test StructuresMcDonough, Colin; Atesang, Jacob; Wang, Yunfei; Geer, Robert E.; Seiler, David G.; Diebold, Alain C.; McDonald, Robert; Garner, C. Michael; Herr, Dan; Khosla, Rajinder P.; Secula, Erik M. · 2007