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A Novel Platform for Production-worthy ArF ResistKim, Hyun-Woo; Choi, Sang-Jun; Jung, Dong-Won; Lee, Sook; Lee, Sung-Ho; Kang, Yool; Woo, Sang-Gyun; Moon, Joo-Tae; Kavanagh, Robert; Barclay, George; Orsula, George; Mattia, Joe; Caporale, Stefan; Adams, Tim; Tanaka, Tsutomu; Kang, Doris · Journal of Photopolymer Science and Technology · 2001