![[IEEE Proceedings of the IEEE 2001 International Interconnect Technology Conference - Burlingame, CA, USA (2001.06.6-2001.06.6)] Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) - Step coverage and continuity of an I-PVD Ta(N) barrier layer: limitations]()
[IEEE Proceedings of the IEEE 2001 International Interconnect Technology Conference - Burlingame, CA, USA (2001.06.6-2001.06.6)] Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) - Step coverage and continuity of an I-PVD Ta(N) barrier layer: limitationsTokei, Z.; McInerney, D.; Baklanov, M.; Beyer, G.P.; Maex, K. · 2001