SIMOX SOI for integrated circuit fabrication : Hon Wai Lam. IEEE Circuits Devices Mag., 6 (July 1987)
- 卷第28卷
- 期第4期
- 印刷ISSN0026-2714
- 文件大小117.56KB
- 发表时间1988
- DOI10.1016/0026-2714(88)90216-8
同作者推荐
Spin-on-glass material curing and etchingRadko Osredkar · 1994
Influence of an Insulating Film on Plasma Silicon Dioxide Deposition RatesOsredkar, Radko · Journal of The Electrochemical Society · 1986
Numerical analysis of a SWEAT structure with an improved one dimensional nonlinear modelMarijan Maček; Al.V. Kordesch; Radko Osredkar · 1994