Chemical vapour deposition of TiN layers in various glow discharge regionsJ. Michalski; T. Wierzchoń · 1991

Properties of composite layers produced on stainless steel under glow discharge conditionsT. Wierzchoń; J. Michalski; J. Rudnicki · 1991

Formation of titanium nitride layers from a gaseous phase with the participation of a chemical reactionJ. Michalski; T. Wierzchoń · 1989

Deposition of surface layers by the LPCVD process conducted in a TiCl4+ H2atmosphere: contribution of the nitrogen contained in the steel substrateJ. Michalski; T. Wierzchoń · 1990