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Fabrication of smooth facets of InP by selective sidewall epitaxy using CBEM. Gotoda; H. Sugimoto; S. Maruno; T. Isu; W. Susaki; M. Nunoshita · 1994
Symmetric InP mirror facets fabricated by selective chemical beam epitaxy on reactive-ion-etched sidewallsM. Gotoda; H. Sugimoto; S. Maruno; T. Isu; W. Susaki; M. Nunoshita · 1995