![SPIE Proceedings [SPIE 1984 Los Angeles Techincal Symposium - Los Angeles (Tuesday 24 January 1984)] Advanced Semiconductor Processing/Characterization of Electronic/Optical Materials - <title>Oxidation Of Singular And Vicinal Surfaces Of Silicon: The Structure Of Si-Si0<formula><inf><roman>2</roman></inf></formula> Interface</title>]()
SPIE Proceedings [SPIE 1984 Los Angeles Techincal Symposium - Los Angeles (Tuesday 24 January 1984)] Advanced Semiconductor Processing/Characterization of Electronic/Optical Materials - <title>Oxidation Of Singular And Vicinal Surfaces Of Silicon: The Structure Of Si-Si0<formula><inf><roman>2</roman></inf></formula> Interface</title>Mazur, J. H.; Gronsky, R.; Washburn, J.; Lampert, Carl M.; Sadana, Devindra K. · 1984