Gap Length Dependence of Electron Energy Distribution in Low-Pressure Ar Capacitively Coupled RF Discharges
- 期刊名称Japanese Journal of Applied Physics
- 作者Kimura, Takashi; Kaga, Kouji; Ohe, Kazuyuki
- 卷第39卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小551.38KB
- 发表时间2000-3-15
- DOI10.1143/JJAP.39.1351
- 页码1351-1357
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