海量图书期刊资源,随时随地畅享阅读乐趣
Microstructure and structure characteristics of cubic WNx compoundsY.G Shen; Y.W Mai · 2000
Structural properties and nitrogen-loss characteristics in sputtered tungsten nitride filmsY.G Shen; Y.W Mai; W.E McBride; Q.C Zhang; D.R McKenzie · 2000
Structural studies of amorphous and crystallized tungsten nitride thin films by EFED, XRD and TEMY.G Shen; Y.W Mai · 2000
Effect of deposition conditions on internal stresses and microstructure of reactively sputtered tungsten nitride filmsY.G Shen; Y.W Mai · 2000
Effect of oxygen on residual stress and structural properties of tungsten nitride films grown by reactive magnetron sputteringY.G Shen; Y.W Mai · 2000