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Determination of the electrical properties of ultrathin silicon-based dielectric films: thermally grown SiNx

Determination of the electrical properties of ultrathin silicon-based dielectric films: thermally grown SiNx

N. Pic; A. Glachant; S. Nitsche; J.Y. Hoarau; D. Goguenheim; D. Vuillaume; A. Sibai; C. Chaneliere
  • 作者N. Pic; A. Glachant; S. Nitsche; J.Y. Hoarau; D. Goguenheim; D. Vuillaume; A. Sibai; C. Chaneliere
  • 卷第45卷
  • 期第8期
  • 印刷ISSN0038-1101
  • 文件大小237.32KB
  • 发表时间2001
  • DOI10.1016/s0038-1101(01)00174-5
  • 页码1265-1270
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