Defect characteristics by boron cluster ion implantation
- 作者Takaaki Aoki; Jiro Matsuo; Gikan Takaoka; Noriaki Toyoda; Isao Yamada
- 卷第206卷
- 印刷ISSN0168-583X
- 文件大小156.72KB
- 发表时间2003
- DOI10.1016/s0168-583x(03)00878-4
- 页码855-860
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