![Multiple replication of hierarchical structures from polymer masters with anisotropy]()
Multiple replication of hierarchical structures from polymer masters with anisotropyMayer, Andre; Rond, Johannes; Staabs, Johannes; Leifels, Miriam; Zajadacz, Joachim; Ehrhardt, Martin; Lorenz, Pierre; Sunagawa, Hiroki; Hirai, Yoshihiko; Zimmer, Klaus; Scheer, Hella-Christin · Journal of Vacuum Science & Technology B · 2019