![A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing]()
A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot PressingSato, Norio; Ishii, Hiromu; Shigematsu, Satoshi; Morimura, Hiroki; Kamei, Toshikazu; Kudou, Kazuhisa; Yano, Masaki; Machida, Katsuyuki; Kyuragi, Hakaru · Japanese Journal of Applied Physics · 2003