![[IEEE IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Munich, Germany (31 March-1 April 2003)] Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI - Dopant redistribution and loss during ternary silicide Co/sub x/Ni/sub 1-x/Si/sub 2/ formation]()
[IEEE IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Munich, Germany (31 March-1 April 2003)] Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI - Dopant redistribution and loss during ternary silicide Co/sub x/Ni/sub 1-x/Si/sub 2/ formationXu, Y.Q.; Zhao, J.; Lu, J.P.; Miles, D.; Loewecke, J.; Tiner, P.; Xia Dong, ; Novak, S.W. · 2003