![Improved electrical and material characteristics of HfTaO gate dielectrics with high crystallization temperature]()
Improved electrical and material characteristics of HfTaO gate dielectrics with high crystallization temperatureZhang, M. H.; Rhee, S. J.; Kang, C. Y.; Choi, C. H.; Akbar, M. S.; Krishnan, S. A.; Lee, T.; Ok, I. J.; Zhu, F.; Kim, H. S.; Lee, Jack C. · Applied Physics Letters · 2005