Fabrication and analysis of high-performance piezoelectric MEMS generators
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Tang, Gang; Liu, Jing-quan; Yang, Bin; Luo, Jiang-bo; Liu, He-sheng; Li, Yi-gui; Yang, Chun-sheng; He, Dan-nong; Dao, Viet Dzung; Tanaka, Katsuhiko; Sugiyama, Susumu
- 卷第22卷
- 期第6期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小1832.87KB
- 发表时间2012-06-01
- DOI10.1088/0960-1317/22/6/065017
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