![[IEEE 2010 Winter Simulation Conference - (WSC 2010) - Baltimore, MD, USA (2010.12.5-2010.12.8)] Proceedings of the 2010 Winter Simulation Conference - A multistage mathematical programming based scheduling approach for the photolithography area in semiconductor manufacturing]()
[IEEE 2010 Winter Simulation Conference - (WSC 2010) - Baltimore, MD, USA (2010.12.5-2010.12.8)] Proceedings of the 2010 Winter Simulation Conference - A multistage mathematical programming based scheduling approach for the photolithography area in semiconductor manufacturingKlemmt, Andreas; Lange, Jan; Weigert, Gerald; Lehmann, Frank; Seyfert, Jens · 2010