![Three-dimensional imaging of integrated circuits with macro- to nanoscale zoom]()
Three-dimensional imaging of integrated circuits with macro- to nanoscale zoomHoller, Mirko; Odstrcil, Michal; Guizar-Sicairos, Manuel; Lebugle, Maxime; Müller, Elisabeth; Finizio, Simone; Tinti, Gemma; David, Christian; Zusman, Joshua; Unglaub, Walter; Bunk, Oliver; Raabe, Jörg; Levi, A. F. J.; Aeppli, Gabriel · Nature Electronics · 2019