![Investigation of Deep Interface Traps in Very-Thin Oxide/Si Structures Prepared at Low Temperatures Using Chemical Solutions]()
Investigation of Deep Interface Traps in Very-Thin Oxide/Si Structures Prepared at Low Temperatures Using Chemical SolutionsRusnák, Jaroslav; Ružinský, Michal; Imamura, Kentaro; Matsumoto, Taketoshi; Štefečka, Miloslav; Takahashi, Masao; Kobayashi, Hikaru; Pinčík, Emil · Materials Science Forum · 2009