![The effect of substrate holder size on the electric field and discharge plasma on diamond-film formation at high deposition rates during MPCVD]()
The effect of substrate holder size on the electric field and discharge plasma on diamond-film formation at high deposition rates during MPCVDAN, Kang; CHEN, Liangxian; LIU, Jinlong; ZHAO, Yun; YAN, Xiongbo; HUA, Chenyi; GUO, Jianchao; WEI, Junjun; HEI, Lifu; LI, Chengming; LU, Fanxiu · Plasma Science and Technology · 2017