![[IEEE 2018 IEEE SENSORS - New Delhi, India (2018.10.28-2018.10.31)] 2018 IEEE SENSORS - A Resonant Pressure Micro Sensor with a Stress Isolation Layer]()
[IEEE 2018 IEEE SENSORS - New Delhi, India (2018.10.28-2018.10.31)] 2018 IEEE SENSORS - A Resonant Pressure Micro Sensor with a Stress Isolation LayerLu, Yulan; Xie, Bo; Wei, Qiuxu; Li, Yadong; Shi, Xiaoqing; Xiang, Chao; Chen, Deyong; Wang, Junbo; Chen, Jian · 2018