![Fabrication and analysis of high-performance piezoelectric MEMS generators]()
Fabrication and analysis of high-performance piezoelectric MEMS generatorsTang, Gang; Liu, Jing-quan; Yang, Bin; Luo, Jiang-bo; Liu, He-sheng; Li, Yi-gui; Yang, Chun-sheng; He, Dan-nong; Dao, Viet Dzung; Tanaka, Katsuhiko; Sugiyama, Susumu · Journal of Micromechanics and Microengineering · 2012