Spin coating over topographyPeurrung, L.M.; Graves, D.B. · IEEE Transactions on Semiconductor Manufacturing · 1993

2014 VLSI Technology SymposuimIEEE Transactions on Semiconductor Manufacturing · 2014

Leading the field since 1884IEEE Transactions on Semiconductor Manufacturing · 2013

Supplier improvement via SPC applications workshopsAckermann, C.S. · IEEE Transactions on Semiconductor Manufacturing · 1993

Specular spectroscopic scatterometryXinhui Niu, ; Jakatdar, N.; Junwei Bao, ; Spanos, C.J. · IEEE Transactions on Semiconductor Manufacturing · 2001

A Continuous Murphy's IntegralNadarajah, S. · IEEE Transactions on Semiconductor Manufacturing · 2009

Defect size distribution in VLSI chipsGlang, R. · IEEE Transactions on Semiconductor Manufacturing · 1991

A new gas circulation RIEOhiwa, T.; Sakai, I.; Okumura, K. · IEEE Transactions on Semiconductor Manufacturing · 2000