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Studies of the Photo Acid Generator Material Design for Chemically Amplified PhotoresistsUtsumi, Yoshiyuki; Seshimo, Takehiro; Komuro, Yoshitaka; Kawaue, Akiya; Ishiduka, Keita; Matsuzawa, Kensuke; Hada, Hideo; Onodera, Junichi · Japanese Journal of Applied Physics · 2009