![Low resistivity Ga-doped ZnO thin films of less than 100 nm thickness prepared by ion plating with direct current arc discharge]()
Low resistivity Ga-doped ZnO thin films of less than 100 nm thickness prepared by ion plating with direct current arc dischargeYamada, Takahiro; Miyake, Aki; Kishimoto, Seiichi; Makino, Hisao; Yamamoto, Naoki; Yamamoto, Tetsuya · Applied Physics Letters · 2007