![SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Microelectronics: Design, Technology, and Packaging - Process management and design for MEMS and microelectronics technologies]()
SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Microelectronics: Design, Technology, and Packaging - Process management and design for MEMS and microelectronics technologiesAbbott, Derek; Hahn, Kai; Popp, Jens; Eshraghian, Kamran; Musca, Charles A.; Wagener, Andreas; Pavlidis, Dimitris; Weste, Neil · 2003