Thin Film Deposition in Capacitively Coupled Plasmas Fed with Bis(dimethylamino)dimethylsilane and Oxygen: An FTIR study
- 作者Rosa Di Mundo; Fabio Palumbo; Francesco Fracassi; Riccardo d'Agostino
- 卷第6卷
- 期第8期
- 印刷ISSN1612-8850
- 电子ISSN1612-8869
- 文件大小420.89KB
- 发表时间2009
- DOI10.1002/ppap.200800206
- 页码506-511
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