![Complete Micropipe Dissociation in 4H-SiC(03-38) Epitaxial Growth and its Impact on Reverse Characteristics of Schottky Barrier Diodes]()
Complete Micropipe Dissociation in 4H-SiC(03-38) Epitaxial Growth and its Impact on Reverse Characteristics of Schottky Barrier DiodesKimoto, Tsunenobu; Danno, Katsunori; Fujihira, Keiko; Shiomi, Hiromu; Matsunami, Hiroyuki · Materials Science Forum · 2003