海量图书期刊资源,随时随地畅享阅读乐趣
Catalytic Chemical Sputtering: A Novel Method for Obtaining Large-Grain Polycrystalline SiliconMatsumura, Hideki; Kamesaki, Koji; Masuda, Atsushi; Izumi, Akira · Japanese Journal of Applied Physics · 2001
Properties of Large Grain-Size poly-Si Films by Catalytic Chemical SputteringMasuda, Atsushi; Kamesaki, Koji; Izumi, Akira; Matsumura, Hideki · MRS Proceedings · 2001
In situ chamber cleaning using atomic H in catalytic-CVD apparatus for mass production of a-Si:H solar cellsAtsushi Masuda; Yoriko Ishibashi; Kenji Uchida; Koji Kamesaki; Akira Izumi; Hideki Matsumura · 2002
Effects of atomic hydrogen in gas phase on a-Si:H and poly-Si growth by catalytic CVDHironobu Umemoto; Yoshitaka Nozaki; Makiko Kitazoe; Katsuhiko Horii; Kentaro Ohara; Daisuke Morita; Kenji Uchida; Yoriko Ishibashi; Manabu Komoda; Koji Kamesaki; Akira Izumi; Atsushi Masuda; Hideki Matsumura · 2002