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Uncooled Thermoelectric Infrared Sensor With Advanced MicromachiningDehui Xu; Bin Xiong; Guoqiang Wu; Yinglei Ma; Yuelin Wang · 2012
Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonatorWu, Guoqiang; Xu, Dehui; Xiong, Bin; Wang, Yuelin · Applied Physics Letters · 2012
High <formula formulatype="inline"><tex notation="TeX">$Q$</tex></formula> Single Crystal Silicon Micromechanical Resonators With Hybrid Etching ProcessWu, Guoqiang; Xu, Dehui; Xiong, Bin; Wang, Yuelin · IEEE Sensors Journal · 2012
Resonant Magnetic Field Sensor With Capacitive Driving and Electromagnetic Induction SensingWu, Guoqiang; Xu, Dehui; Xiong, Bin; Feng, Duan; Wang, Yuelin · IEEE Electron Device Letters · 2013
Wafer-Level Vacuum Packaging for MEMS Resonators Using Glass Frit BondingWu, Guoqiang; Xu, Dehui; Xiong, Bin; Wang, Yuchen; Wang, Yuelin; Ma, Yinglei · Journal of Microelectromechanical Systems · 2012
Wafer-Level Vacuum Packaging for Microsystems Using Glass Frit BondingWu, Guoqiang; Xu, Dehui; Sun, Xiao; Xiong, Bin; Wang, Yuelin · IEEE Transactions on Components, Packaging and Manufacturing Technology · 2013
Phononic crystal strip based anchors for reducing anchor loss of micromechanical resonatorsFeng, Duan; Xu, Dehui; Wu, Guoqiang; Xiong, Bin; Wang, Yuelin · Journal of Applied Physics · 2014
A highQmicromachined single crystal silicon bulk mode resonator with pre-etched cavityGuoqiang Wu; Dehui Xu; Bin Xiong; Yuelin Wang · 2012
Microfluidics-a reviewGravesen, P; Branebjerg, J; Jensen, O S · Journal of Micromechanics and Microengineering · 1993
Inkjet deposited circuit componentsBidoki, S M; Nouri, J; Heidari, A A · Journal of Micromechanics and Microengineering · 2010
Wafer level packaging of MEMSEsashi, Masayoshi · Journal of Micromechanics and Microengineering · 2008
Micro electrochemical millingKim, Bo Hyun; Ryu, Shi Hyoung; Choi, Deok Ki; Chu, Chong Nam · Journal of Micromechanics and Microengineering · 2005
Hydrophobicity of curved microstructured surfacesCannon, A H; King, W P · Journal of Micromechanics and Microengineering · 2010
A review of microvalvesOh, Kwang W; Ahn, Chong H · Journal of Micromechanics and Microengineering · 2006
Dielectrophoretic deflection of ink jetsChiarot, Paul R; Jones, T B · Journal of Micromechanics and Microengineering · 2009
Investigation of a resonance microgeneratorMizuno, Makoto; Chetwynd, Derek G · Journal of Micromechanics and Microengineering · 2003