![Measurement and modeling of Ar∕H[sub 2]∕CH[sub 4] arc jet discharge chemical vapor deposition reactors. I. Intercomparison of derived spatial variations of H atom, C[sub 2], and CH radical densities]()
Measurement and modeling of Ar∕H[sub 2]∕CH[sub 4] arc jet discharge chemical vapor deposition reactors. I. Intercomparison of derived spatial variations of H atom, C[sub 2], and CH radical densitiesRennick, C. J.; Ma, J.; Henney, J. J.; Wills, J. B.; Ashfold, M. N. R.; Orr-Ewing, A. J.; Mankelevich, Yu. A. · Journal of Applied Physics · 2007