Development and characterization of surface micromachined, out-of-plane hot-wire anemometerChen, J.; Chang Liu, · Journal of Microelectromechanical Systems · 2003

Development and experimental characterization of micromachined electromagnetic probes for biological manipulation and stimulation applicationsMurat K. Yapici; Ali E. Ozmetin; Jun Zou; Donald G. Naugle · 2008

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Materials and Device Characterization in Micromachining III - <title>Development of a high-performance SOI-fabricated gyroscope</title>Rajendran, S.; Liew, Kim M.; Loke, Yee C.; Liu, Ai Q.; Vladimirsky, Yuli; Coane, Philip J. · 2000

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - <title>Development of TiNi shape memory alloy film deposited by sputtering from separate Ti and Ni targets</title>Ohta, Akihiro; Bhansali, Shekhar; Kishimoto, Isao; Umeda, Akira; Friedrich, Craig R.; Vladimirsky, Yuli · 1998

SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - <title>Development of a laser micromachining toolbox and its application to the production of 3D microstructures</title>Greuters, Jako; Rizvi, Nadeem H.; Behringer, Uwe F. W.; Uttamchandani, Deepak G. · 2001

SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] MEMS Reliability for Critical and Space Applications - <title>Development of characterization tools for reliability testing of micro-electro-mechanical system actuators</title>Smith, Norman F.; Eaton, William P.; Tanner, Danelle M.; Allen, James J.; Lawton, Russell A.; Miller, William M.; Lin, Gisela; Ramesham, Rajeshuni · 1999

SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - Development of a mechanical model for a micromachined resonant force sensor used in passive microgripping applicationsBahadur, Issam B.; Tanner, Danelle M.; Ramesham, Rajeshuni; Mills, James K. · 2006

Energetic Nanoporous Silicon DevicesCurrano, L.J.; Churaman, W.A. · Journal of Microelectromechanical Systems · 2009

Two-Axis Microstage SystemBeverly, P.; Sivakumar, G.; Dallas, T. · Journal of Microelectromechanical Systems · 2008

Novel Capacitive Pressure SensorBakhoum, Ezzat G; Cheng, Marvin H M · Journal of Microelectromechanical Systems · 2010

Surface micromachined piezoelectric accelerometers (PiXLs)DeVoe, D.L.; Pisano, A.P. · Journal of Microelectromechanical Systems · 2001

Photopatternable Superhydrophobic Nanocomposites for MicrofabricationHong, Lingfei; Pan, Tingrui · Journal of Microelectromechanical Systems · 2010

Deformable Polymer Adaptive Optical MirrorsFriese, C.; Zappe, H. · Journal of Microelectromechanical Systems · 2008

Microorganisms for MEMSXiong, Xiaorong; Lidstrom, Mary E.; Parviz, Babak A. · Journal of Microelectromechanical Systems · 2007

A planar electroosmotic micropumpChuan-Hua Chen, ; Santiago, J.G. · Journal of Microelectromechanical Systems · 2002