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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Bonding mechanism in the Velcro concept Si-Si low temperature direct bonding techniqueKeshavarzi, Shervin; Mescheder, Ulrich; Reinecke, Holger · 2015
[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - A betavoltaic microcell based on semiconducting single-walled carbon nanotube arrays/Si heterojunctionsLi, M.G.; Zhang, J. · 2015
[IEEE 2015 International 3D Systems Integration Conference (3DIC) - Sendai, Japan (2015.8.31-2015.9.2)] 2015 International 3D Systems Integration Conference (3DIC) - Processing active devices on Si interposer and impact on costVelenis, D.; Detalle, M.; Hellings, G.; Scholz, M.; Marinissen, E.J.; Van der Plas, G.; La Manna, A.; Miller, A.; Linten, D.; Beyne, E. · 2015
[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Micro fluidic chamber with thin Si windows for observation of biological samples in vacuumHayashi, Hideki; Toda, Masaya; Ono, Takahito · 2015
[IEEE 2015 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems (COMCAS) - Tel-Aviv, Israel (2015.11.2-2015.11.4)] 2015 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems (COMCAS) - Terahertz detection in Si MOSFET based on thermionic emissionDayalu, Jagannath B.; Ignjatovic, Zeljko; Bocko, Mark F.; McMurtry, Craig W.; Pipher, Judith L.; Ninkov, Zoran; Newman, J. Daniel; Sacco, Andrew P.; Ryan, Frank J.; Fourspring, Kenny D.; Lee, Paul P.K. · 2015
[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Low-noise AlN-on-Si resonant infrared detectors using a commercial foundry MEMS fabrication processGokhale, Vikrant J.; Figueroa, Cesar; Tsai, Julius Ming Lin; Rais-Zadeh, Mina · 2015
[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Integration of distributed Ge islands onto Si wafers by adhesive wafer bonding and low-temperature Ge exfoliationForsberg, F.; Roxhed, N.; Colinge, C.; Stemme, G.; Niklaus, F. · 2015
[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Hard mask free DRIE of crystalline Si nanobarrel with 6.7nm wall thickness and 50∶1 aspect ratioLiu, Peng; Yang, Fang; Wang, Wei; Wang, Wei; Luo, Kui; Wang, Ying; Zhang, Dacheng · 2015