海量图书期刊资源,随时随地畅享阅读乐趣
Electron Dynamics in Chemically Amplified ResistsKozawa, Takahiro; Yamamoto, Hiroki; Nakano, Atsuko; Saeki, Akinori; Okamoto, kazumasa; Tagawa, Seiichi · Journal of Photopolymer Science and Technology · 2004
Dissolution Kinetics in Chemically Amplified EUV ResistYamamoto, Hiroki; Kozawa, Takahiro; Tagawa, Seiichi; Mimura, Takeyoshi; Iwai, Takeshi; Onodera, Junichi · Journal of Photopolymer Science and Technology · 2011
Reaction Mechanisms of Brominated Chemically Amplified ResistsYamamoto, Hiroki; Kozawa, Takahiro; Nakano, Atsuro; Okamoto, Kazumasa; Tagawa, Seiichi; Ando, Tomoyuki; Sato, Mitsuru; Komano, Hiroji · Japanese Journal of Applied Physics · 2005
Single-Component Chemically Amplified Resist Based on Dehalogenation of PolymerYamamoto, Hiroki; Kozawa, Takahiro; Tagawa, Seiichi; Ohmori, Katsumi; Sato, Mitsuru; Komano, Hiroji · Japanese Journal of Applied Physics · 2007
Enhancement of Acid Production in Chemically Amplified Resist for Extreme Ultraviolet LithographyYamamoto, Hiroki; Kozawa, Takahiro; Tagawa, Seiichi; Yukawa, Hiroto; Sato, Mitsuru; Onodera, Junichi · Applied Physics Express · 2008
Effect of Acid Diffusion and Polymer Structure on Line Edge RoughnessYamamoto, Hiroki; Kozawa, Takahiro; Saeki, Akinori; Okamoto, Kazumasa; Tagawa, Seiichi; Ohmori, Katsumi; Sato, Mitsuru; Komano, Hiroji · Japanese Journal of Applied Physics · 2007
Polymer Screening Method for Chemically Amplified Electron Beam and X-Ray ResistsYamamoto, Hiroki; Nakano, Atsuro; Okamoto, Kazumasa; Kozawa, Takahiro; Tagawa, Seiichi · Japanese Journal of Applied Physics · 2004
Spectral Emissivity of SiliconSatō, Tsutomu · Japanese Journal of Applied Physics · 1967
Surface Acoustic Wave SensorsShiokawa, Showko; Kondoh, Jun · Japanese Journal of Applied Physics · 2004
Perspectives in SonochemistryAndo, Takashi; Kimura, Takahide · Japanese Journal of Applied Physics · 2003
Structurally Stable Hyperbolic BeamChakraborty, Rijuparna; Ghosh, Ajay · Japanese Journal of Applied Physics · 2009
Peierls Phase TransitionKagoshima, Seiichi · Japanese Journal of Applied Physics · 1981
Piezoelectric Tensor of KNbO <sub/>3</sub>Günter, P. · Japanese Journal of Applied Physics · 1977
Plasma Anodic Oxidation of InPFuyuki, Takashi; Moriuchi, Sohta; Matsunami, Hiroyuki · Japanese Journal of Applied Physics · 1983
Linearity Characteristics of Multiplier PhototubesNonaka, Mamoru; Kashima, Takeo · Japanese Journal of Applied Physics · 1963