![Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units]()
Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna UnitsTakenaka, Kosuke; Setsuhara, Yuichi; Nishisaka, Kazuaki; Ebe, Akinori; Sugiura, Shinya; Takahashi, Kazuo; Ono, Koichi · Japanese Journal of Applied Physics · 2006